The different types of lithography, each with their unique capabilities, serve as key tools for scientists and engineers to create and manipulate structures at the nanoscale. This article delves into ...

Extreme ultraviolet (EUV) lithography is the next step in this trend. It uses radiation of wavelength 13.5 nm, thereby offering significant potential to extend the resolution of photolithography ...

there are no viable challengers to EUV lithography for making integrated circuits. However, there are many different types of lithography being developed that could find uses in other applications ...

However, it faces limitations such as diffraction and scattering of light, which set bounds on the minimum feature size that can be achieved. Advanced techniques like extreme ultraviolet (EUV) ...