For example, so-called double-patterning techniques ... and also raise production costs per chip. Extreme ultraviolet lithography can achieve these resolutions with a single exposure and with ...

Extreme-ultraviolet (EUV) lithography at 13.5 nm is expected to be introduced in high-volume semiconductor chip production over the next three years. Research is now underway to investigate sub-10 ...

Soft lithography is a family of non-photolithographic techniques used for fabricating micro- and nanostructures using elastomeric stamps, molds, and conformable photomasks. Unlike conventional ...

For example, ordered arrays of metal nanoparticles or nanostructured electrodes can ... The combination of NCL with other nanofabrication methods, such as nanoimprint lithography or block copolymer ...